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Piezoelectric devices transduce mechanical energy to electrical energy by elastic deformation, which distorts local dipoles in crystalline materials. Amongst electromechanical sensors, piezoelectric devices are advantageous because of their scalability, light weight, low power consumption, and readily built-in amplification and ability for multiplexing, which are essential for wearables, medical devices, and robotics. This paper reviews recent progress in active piezoelectric devices. We classify these piezoelectric devices according to the material dimensionality and present physics-based device models to describe and quantify the piezoelectric response for one-dimensional nanowires, emerging two-dimensional materials, and three-dimensional thin films. Different transduction mechanisms and state-of-the-art devices for each type of material are reviewed. Perspectives on the future applications of active piezoelectric devices are discussed. 

Cortex in high resolution Recording brain cortical activity with high spatial and temporal resolution is critical for understanding brain circuitry in physiological and pathological conditions. In this study, Tchoe et al. developed a reconfigurable and scalable thin-film, multithousand-channel neurophysiological recording grids using platinum nanorods, called PtNRGrids, that could record thousands of channels with submillimeter resolution in the rat barrel cortex. In human subjects, PtNRGrids were able to provide high-resolution recordings of large and curvilinear brain areas and to resolve spatiotemporal dynamics of motor and sensory activities. The results suggest that PtNRGrids could be used in the preclinical and clinical setting for high spatial and temporal recording of neural activity. 

Abstract Highly sensitive force sensors of piezoelectric zinc oxide (ZnO) dual‐gate thin film transistors (TFTs) are reported together with an analytical model that elucidates the physical origins of their response. The dual‐gate TFTs are fabricated on a polyimide substrate and exhibited a field effect mobility of ≈5 cm²V⁻¹s⁻¹,I_max/I_minratio of 10⁷, and a subthreshold slope of 700 mV dec⁻¹, and demonstrated static and transient current changes under external forces with varying amplitude and polarity in different gate bias regimes. To understand the current modulation of the dual‐gate TFT with independently biased top and bottom gates, an analytical model is developed. The model includes accumulation channels at both surfaces and a bulk channel within the film and accounts for the force‐induced piezoelectric charge density. The microscopic piezoelectric response that modulates the energy‐band edges and correspondent current–voltage characteristics are accurately portrayed by this model. Finally, the field‐tunable force response in single TFT is demonstrated as a function of independent bias for the top and bottom gates with a force response range from −0.29 to 22.7 nA mN⁻¹. This work utilizes intuitive analytical models to shed light on the correlation between the material properties with the force response in piezoelectric TFTs. 

Abstract Despite ongoing advances in our understanding of local single-cellular and network-level activity of neuronal populations in the human brain, extraordinarily little is known about their “intermediate” microscale local circuit dynamics. Here, we utilized ultra-high-density microelectrode arrays and a rare opportunity to perform intracranial recordings across multiple cortical areas in human participants to discover three distinct classes of cortical activity that are not locked to ongoing natural brain rhythmic activity. The first included fast waveforms similar to extracellular single-unit activity. The other two types were discrete events with slower waveform dynamics and were found preferentially in upper cortical layers. These second and third types were also observed in rodents, nonhuman primates, and semi-chronic recordings from humans via laminar and Utah array microelectrodes. The rates of all three events were selectively modulated by auditory and electrical stimuli, pharmacological manipulation, and cold saline application and had small causal co-occurrences. These results suggest that the proper combination of high-resolution microelectrodes and analytic techniques can capture neuronal dynamics that lay between somatic action potentials and aggregate population activity. Understanding intermediate microscale dynamics in relation to single-cell and network dynamics may reveal important details about activity in the full cortical circuit. 

Abstract The Utah array powers cutting‐edge projects for restoration of neurological function, such as BrainGate, but the underlying electrode technology has itself advanced little in the last three decades. Here, advanced dual‐side lithographic microfabrication processes is exploited to demonstrate a 1024‐channel penetrating silicon microneedle array (SiMNA) that is scalable in its recording capabilities and cortical coverage and is suitable for clinical translation. The SiMNA is the first penetrating microneedle array with a flexible backing that affords compliancy to brain movements. In addition, the SiMNA is optically transparent permitting simultaneous optical and electrophysiological interrogation of neuronal activity. The SiMNA is used to demonstrate reliable recordings of spontaneous and evoked field potentials and of single unit activity in chronically implanted mice for up to 196 days in response to optogenetic and to whisker air‐puff stimuli. Significantly, the 1024‐channel SiMNA establishes detailed spatiotemporal mapping of broadband brain activity in rats. This novel scalable and biocompatible SiMNA with its multimodal capability and sensitivity to broadband brain activity will accelerate the progress in fundamental neurophysiological investigations and establishes a new milestone for penetrating and large area coverage microelectrode arrays for brain–machine interfaces.